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MEMS and NEMS systems, devices, and structures /
Author
Lyshevski, Sergey Edward.
Published
CRC Pr.,
Call Number
TK7875 L993
Location
Central Library
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Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering /
Author
Lyshevski, Sergey Edward.
Published
CRC Press,
Call Number
TK7875 L993N 2005
Location
Central Library
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